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Airgard

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Scan day: 12 February 2014 UTC
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Description: Efficient and reliable exhaust (effluent) gas scrubber for water soluble gas applications in the semiconductor processing industry
High Capacity, High Efficiency Point-of-Use Wet Scrubber Zero scrubber related process tool downtime. Scheduled maintenance intervals are 4-6 months and can be performed during process tool PMs. Highly efficient gas scrubbing with specialized gas inlet devices that minimize restrictions.
Size: 288 chars

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Page title:Airgard
Keywords:Airgard, Wet scrubbers, Scrubbers, Fume scrubbers, Airguard, Abatement, Exhaust gasses, Gas Treatment, Acid fume scrubber, Gas scrubbing, Exhaust scrubbers, Johnsgard, Epi, fume scrubbers, Epi scrubbers, Toxic gases, Vector, Ecosys, Eco-sys, ATMI, CET, Epitaxy, Exhaust gas scrubbers, Exhaust gas abatement, Semiconductor gasses, Environmental, Gas cleaner, Gas purifier, Epitaxial, Silicon tetrachloride, Hydrogen chloride, Chlorosilane, Trichlorosilane, Dichlorosilane, Air guard, airguard, air gard, airgaurd, metal etch, poly etch, CVD, gas, inlet, patented inlet, water-soluble gases, PLC control box, packed column, semiconductor gases, toxic gasses
Description:Airgard's point-of-use fume scrubber can reduce a process tool's scrubber-related downtime to zero. Whether running epitaxial, metal etch, poly etch or CVD, the patented scrubbing technology, automated gas inlet plunger and custom scrubber inlets are tailored to individual processes to provide maximum uptime and process stability.
IP-address:65.110.73.238

WHOIS Info

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Name Server: NS1.BDM.MICROSOFTONLINE.COM
Name Server: NS2.BDM.MICROSOFTONLINE.COM
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Date
Creation Date: 12-may-1999
Expiration Date: 12-may-2014